Normal view MARC view ISBD view

Development of flow temperature oxidation process using ozone for vlsi

Tomar, R.S.

Development of flow temperature oxidation process using ozone for vlsi - Roorkee Department of electronics & communication engineering 2013 - ix, 51 p.

Dewey Class. No.: 621.38072 / TOM

Print
Suggest for purchase
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)