Machining of silicon wafers using ultrasonic machining (USM)
Gupta, Shailesh Kumar
Machining of silicon wafers using ultrasonic machining (USM) - India Indian Institute of Technology 2016 - xi, 54p.
Sharma, Apurbha Kumar
Department of Mechanical Engineering
621.072 / GUP
Machining of silicon wafers using ultrasonic machining (USM) - India Indian Institute of Technology 2016 - xi, 54p.
Sharma, Apurbha Kumar
Department of Mechanical Engineering
621.072 / GUP