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Mems and nems systems, devices, and structures

Lyshevski, Sergey E.

Mems and nems systems, devices, and structures - London CRC Press 2002 - 461p. 23cm.

ISBN: 0849312620

Subjects--Uniform Titles:
Microelectromechanical systems

Dewey Class. No.: 621.381 / L98M

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