Advanced micro and nanosystems,v-2;CMOS-MEMS
Advanced micro and nanosystems,v-2;CMOS-MEMS
- Weinheim Wiley-VCH Verlag 2004
- xii,427p. 24cm.
3527310800
Microelectronic circuits
Nanodevices
621.3815 / B18A
3527310800
Microelectronic circuits
Nanodevices
621.3815 / B18A