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Micro-nanofabrication; technologies and applications

Cui, Zheng

Micro-nanofabrication; technologies and applications - Beijing Higher Education Press 2005 - x,304p. 24cm.

ISBN: 7040176637

Subjects--Uniform Titles:
Semiconductors
Thin film technology
Micronanotechnology

Dewey Class. No.: 621.38152 / C77M

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