Kamins,Ted. <br/><br/>
Polycrystalline silicon for integrated circuit applications 

 - U.S.A.  Kluwer academic  1988 
 - xii,290 
<br/><br/><label>ISBN: </label>0898382599 
<br/><br/><label>Dewey Class. No.: </label>621.38173  / K11P