Gupta, Shailesh Kumar <br/><br/>
Machining of silicon wafers using ultrasonic machining (USM) 

 - India  Indian Institute of Technology  2016 
 - xi, 54p. 
<br/><br/><label>Subjects--Personal Names: </label><br/>Sharma, Apurbha Kumar
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>Department of Mechanical Engineering
<br/><br/><label>Dewey Class. No.: </label>621.072  / GUP