Lyshevski, Sergey Edward <br/><br/>
Nano-and Micro Electromechanical Systems  Fundamentals of nano-and microengineering 

 - 2nd 
 - USA  CRC Press  2019 
 - 722p. 
 - Nano- and microscience, engineering, technology and medicine series .
<br/><br/><label>ISBN: </label>9780367147570 
<br/><br/><label>Dewey Class. No.: </label>621.381  / L98N