Elliott, David J. <br/><br/>
Intergrated Circuit Fabrication Technology 

 - New York  McGraw-Hill Pub.  1989 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Intergrated Circuit Fabrication Technology
<br/><br/><label>Dewey Class. No.: </label>621.38173  / E52I