TY  - BOOK
AU  - Lyshevski, Sergey E.
TI  - Mems and nems: systems, devices, and structures
SN  - 0849312620
U1  - 621.381 
PY  - 2002///
CY  - London
PB  - CRC Press
KW  - Microelectromechanical systems
ER  -