Maluf, Nadim <br/><br/>
Introduction to microelectromechanical systems engineering 

 - London  Artech House  2000 
 - xix,265p.  23cm. 
<br/><br/><label>ISBN: </label>0890065810 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381  / M29I