Madou, Marc J. <br/><br/>
Fundamentals of microfabrication  the science of miniaturization 

 - Boca Raton  CRC  2002 
 - 723p. 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Integrated Circuits-Design and Constructions<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.38152  / M26F