TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication: the science of miniaturization
U1  - 621.38152 
PY  - 2002///
CY  - Boca Raton
PB  - CRC
KW  - Integrated Circuits-Design and Constructions
KW  - Microelectronics
ER  -