Gettering and defect engineering in semiconductor technology  GADEST 2003 

 - Switzerland  Scitec Publications  2004 
 - xvi,682p. 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Solid State Phenomena<br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.3815  / I5G