May, Fary.S. <br/><br/>
Fundamentals of semiconductors fabrication 

 - Hoboken  John Wiley and Sons  2004 
 - xiii,305p.  24cm. 
<br/><br/><label>ISBN: </label>981253072x 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.38152  / M48F