Lobontiu, Nicolae <br/><br/>
Mechanics of microelectromechanical systems 

 - New York  Kluwer Academic Publishers  2005 
 - ix,405p.  24cm. 
<br/><br/><label>ISBN: </label>1402080131 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Microelectromechanical systems-Properties<br/>Materials-Microfabrication<br/>Materials-Electrical properties
<br/><br/><label>Dewey Class. No.: </label>620.11297  / L72M