TY  - BOOK
AU  - Lobontiu, Nicolae
AU  - Garcia, Ephrahim jt.au.
TI  - Mechanics of microelectromechanical systems
SN  - 1402080131
U1  - 620.11297 
PY  - 2005///
CY  - New York
PB  - Kluwer Academic Publishers
KW  - Microelectromechanical systems-Properties
KW  - Materials-Microfabrication
KW  - Materials-Electrical properties
ER  -