Cui, Zheng <br/><br/>
Micro-nanofabrication; technologies and applications 

 - Beijing  Higher Education Press  2005 
 - x,304p.  24cm. 
<br/><br/><label>ISBN: </label>7040176637 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Semiconductors<br/>Thin film technology<br/>Micronanotechnology
<br/><br/><label>Dewey Class. No.: </label>621.38152  / C77M