TY  - BOOK
AU  - Cui, Zheng
TI  - Micro-nanofabrication; technologies and applications
SN  - 7040176637
U1  - 621.38152 
PY  - 2005///
CY  - Beijing
PB  - Higher Education Press
KW  - Semiconductors
KW  - Thin film technology
KW  - Micronanotechnology
ER  -