TY  - BOOK
AU  - Varadan, Vijay K.
AU  - Vinoy, K.J. jt.au.
TI  - Smart materials systems and MEMS: design and development methodologies
SN  - 0471093617
U1  - 621.381 
PY  - 2006///
CY  - Chichester
PB  - John wiley and Sons
KW  - Smart materials
KW  - Microelectro mechanical systems
ER  -