TY  - BOOK
AU  - Saliterman, Steven S.
TI  - Fundamentals of biomems and medical microdevices
SN  - 0819459771
U1  - 610.28 
PY  - 2006///
CY  - Washington
PB  - SPIE-The International Society for Optical Engineering
KW  - Microelectrochemical systems
KW  - Nanotechnology
KW  - Biotechnology
ER  -