Gardner, Julian W. <br/><br/>
Microsensors,MEMS, and smart devices 

 - Chichester  John Wiley and Sons  2005 
 - xvii,503p.  24cm. 
<br/><br/><label>ISBN: </label>047186109X 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Detectors<br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381  / G18M