TY  - BOOK
AU  - Sze, S.M. Ed.
TI  - VLSI technology
SN  - 0071003479
U1  - 621.38173 
PY  - 1988///
CY  - New York
PB  - McGraw-Hill Book Company
KW  - Integrated Circuits
KW  - Very Large Scale Integration
ER  -