Mechanics of microelectromechanical systems

By: Lobontiu, NicolaeContributor(s): Garcia, Ephrahim jt.auMaterial type: TextTextPublication details: New York Kluwer Academic Publishers 2005Description: ix,405p. 24cmISBN: 1402080131Subject(s): Microelectromechanical systems-Properties | Materials-Microfabrication | Materials-Electrical propertiesDDC classification: 620.11297
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Item type Current library Call number Copy number Status Date due Barcode
Book Book Mahatma Gandhi Central Library
620.11297 L72M (Browse shelf(Opens below)) 1 Available 322374

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