| 000 | 00320nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471452386 | ||
| 082 |
_a621.38152 _bM48F |
||
| 100 | _aMay,Gray.S. | ||
| 245 | _aFundamental of semiconductor fabrication | ||
| 260 |
_aU.S.A. _bJohn wiley & Sons _c2004 |
||
| 300 | _axiii,305p | ||
| 942 | _cBooks | ||
| 906 | _a153542 | ||
| 981 | _aU.S.A.: John wiley & Sons, 2004. | ||
| 982 | _axiii,305p | ||
| 983 | _aFundamental of semiconductor fabrication | ||
| 999 |
_c138000 _d138000 |
||