000			00500nam a2200145Ia 4500
008			220709b2015 xxu||||| |||| 00| 0 eng d
082			_a621.38072 _bPAL
100			_aPal, Pankaj Kumar
245			_aDual-k spacer engineered devices for high performance digital circuit/SRAM applications
260			_aIndia _bIndian Institute of Technology _c2015
300			_axxii, 126p.
600			_aDasgupta, S,; Kaushik B. K.
654			_aDepartment of Electronics and Communication Engineering
942			_cTheses & Dissertation
906			_a170375
981			_aIndia: Indian Institute of Technology, Roorkee, 2015.
982			_axxii, 126p.
983			_aDual-k spacer engineered devices for high performance digital circuit/SRAM applications
999			_c147871 _d147871