| 000 | 00428nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b1975 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a537.622 _bI5I |
||
| 245 | _aIon implantation in semiconductors science and technology; proceedings of the conference held at the Osake Chamber of commerce and industry,Aug. 1974 | ||
| 260 | _c1975 | ||
| 630 | _aSemiconductors | ||
| 700 | _aNamba Susumu Ed. | ||
| 964 | _bEnglish | ||
| 964 | _ePaper Fo | ||
| 942 | _cBooks | ||
| 906 | _a17881 | ||
| 981 | _a1975. | ||
| 983 | _aIon implantation in semiconductors science and technology; proceedings of the conference held at the Osake Chamber of commerce and industry,Aug. 1974 | ||
| 999 |
_c17729 _d17729 |
||