000 00381nam a2200145Ia 4500
008 220709b1989 xxu||||| |||| 00| 0 eng d
082 _a621.38173
_bE52I
100 _aElliott, David J.
245 _aIntergrated Circuit Fabrication Technology
260 _aNew York
_bMcGraw-Hill Pub.
_c1989
630 _aIntergrated Circuit Fabrication Technology
964 _bEnglish
964 _ePaper Fo
942 _cBooks
906 _a43589
981 _aNew York: McGraw-Hill Pub., 1989.
983 _aIntergrated Circuit Fabrication Technology
999 _c43365
_d43365