000 00367nam a2200157Ia 4500
008 220709b1998 xxu||||| |||| 00| 0 eng d
082 _a621.381045
_bM57L
100 _aMetev, S.M. Veiko, V.P.
245 _aLaser- assisted micro-technology
260 _aBerlin
_bSpringer
_c1998
300 _axii,270p.
630 _aOptoelectronics
964 _bEnglish
964 _ePaper Fo
942 _cBooks
906 _a63500
981 _aBerlin: Springer, 1998.
982 _axii,270p.
983 _aLaser- assisted micro-technology
999 _c60116
_d60116