000 | 00367nam a2200157Ia 4500 | ||
---|---|---|---|
008 | 220709b1998 xxu||||| |||| 00| 0 eng d | ||
082 |
_a621.381045 _bM57L |
||
100 | _aMetev, S.M. Veiko, V.P. | ||
245 | _aLaser- assisted micro-technology | ||
260 |
_aBerlin _bSpringer _c1998 |
||
300 | _axii,270p. | ||
630 | _aOptoelectronics | ||
964 | _bEnglish | ||
964 | _ePaper Fo | ||
942 | _cBooks | ||
906 | _a63500 | ||
981 | _aBerlin: Springer, 1998. | ||
982 | _axii,270p. | ||
983 | _aLaser- assisted micro-technology | ||
999 |
_c60116 _d60116 |