| 000 | 00404nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b2004 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.3815 _bI5G |
||
| 245 |
_aGettering and defect engineering in semiconductor technology _bGADEST 2003 |
||
| 260 |
_aSwitzerland _bScitec Publications _c2004 |
||
| 300 | _axvi,682p. | ||
| 630 | _aSolid State Phenomena | ||
| 630 | _aSemiconductors | ||
| 964 | _bEnglish | ||
| 964 | _ePaper Fo | ||
| 942 | _cBooks | ||
| 906 | _a65913 | ||
| 981 | _aSwitzerland: Scitec Publications, 2004. | ||
| 982 | _axvi,682p. | ||
| 983 | _aGettering and defect engineering in semiconductor technology : GADEST 2003 | ||
| 999 |
_c62520 _d62520 |
||