| 000 | 00412nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a981253072x | ||
| 082 |
_a621.38152 _bM48F |
||
| 100 | _aMay, Fary.S. | ||
| 245 | _aFundamentals of semiconductors fabrication | ||
| 260 |
_aHoboken _bJohn Wiley and Sons _c2004 |
||
| 300 |
_axiii,305p. _c24cm. |
||
| 630 | _aSemiconductors | ||
| 964 | _bEnglish | ||
| 964 | _ePaper Fo | ||
| 942 | _cBooks | ||
| 906 | _a69151 | ||
| 981 | _aHoboken: John Wiley and Sons, 2004. | ||
| 982 | _axiii,305p. : 24cm. | ||
| 983 | _aFundamentals of semiconductors fabrication | ||
| 999 |
_c65738 _d65738 |
||