000 00510nam a2200181Ia 4500
008 220709b2003 xxu||||| |||| 00| 0 eng d
020 _a0471457728
082 _a621.395
_bT86U
100 _aTung, Chih-hang
245 _aULSI semiconductor technology atlas
260 _aHoboken
_bJohn Wiley and Sons
_c2003
300 _axi,666p.
_c25cm.
630 _aIntegrated circuits-Ultra large scale integration-Atlases
630 _aElectron microscopy
700 _aSheng, George T.T. jt.au.
964 _bEnglish
964 _ePaper Fo
942 _cBooks
906 _a70213
981 _aHoboken: John Wiley and Sons, 2003.
982 _axi,666p. : 25cm.
983 _aULSI semiconductor technology atlas
999 _c66789
_d66789