| 000 | 00463nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a7040176637 | ||
| 082 |
_a621.38152 _bC77M |
||
| 100 | _aCui, Zheng | ||
| 245 | _aMicro-nanofabrication; technologies and applications | ||
| 260 |
_aBeijing _bHigher Education Press _c2005 |
||
| 300 |
_ax,304p. _c24cm. |
||
| 630 | _aSemiconductors | ||
| 630 | _aThin film technology | ||
| 630 | _aMicronanotechnology | ||
| 964 | _bEnglish | ||
| 964 | _ePaper Fo | ||
| 942 | _cBooks | ||
| 906 | _a70482 | ||
| 981 | _aBeijing: Higher Education Press, 2005. | ||
| 982 | _ax,304p. : 24cm. | ||
| 983 | _aMicro-nanofabrication; technologies and applications | ||
| 999 |
_c67054 _d67054 |
||