| 000 | 00481nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 220709b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a047186109X | ||
| 082 |
_a621.381 _bG18M |
||
| 100 | _aGardner, Julian W. | ||
| 245 | _aMicrosensors,MEMS, and smart devices | ||
| 260 |
_aChichester _bJohn Wiley and Sons _c2005 |
||
| 300 |
_axvii,503p. _c24cm. |
||
| 630 | _aDetectors | ||
| 630 | _aMicroelectromechanical systems | ||
| 700 | _aVaradan, Osama O. jt.au. | ||
| 964 | _bEnglish | ||
| 964 | _ePaper Fo | ||
| 942 | _cBooks | ||
| 906 | _a72765 | ||
| 981 | _aChichester: John Wiley and Sons, 2005. | ||
| 982 | _axvii,503p. : 24cm. | ||
| 983 | _aMicrosensors,MEMS, and smart devices | ||
| 999 |
_c69308 _d69308 |
||